Fabrication Engineering at the Micro- and Nanoscale

Fabrication Engineering at the Micro- and Nanoscale

Campbell, Stephen A.

Oxford University Press Inc

12/2012

688

Mole

Inglês

9780199861224

15 a 20 dias

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
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